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Model DBM200P

DBM200p

Flip chip bonding machine which enables high speed and high presicion (± 1µm) alingment.

  • High precision flip chip bonder for photonic device
  • Small size chips from 0.25 x 0.25 mm can be used
  • Compact space saving design
  • Automatic calibration offers stable precision
  • Chip angled mounting
  • Easy setting by parameter input for bonding conditions such as bonding head height, compression force, temperature, timing, etc

  • Automatic tool changer
  • For 3 chips (Standard: 2 chips)
  • Substrate and chip edge face recognition function
  • Centroid detection
  • N2 hot purge
  • Chip angled mounting
  • Vacuum pump

ModelDBM200P
Substrate sizeMax. 20 x 20 mm
Chip size0.25 x 0.25 ~ 5.0 x 5.0 mm
Bonding force50 ~ 3000mmN
Chip heatingMax. 450°C
Bonding accuracyX: ± 1µm, Y: ± 1µm, Θ: ± 0.5°
Cycle time60 sec. / chip
Dimensions1000(L) x 1000(W) x 1770(H) mm
Net weight950kg

For further information, please contact;

SHIBUYA KOGYO CO., LTD.
International Marketing Div.
Mameda-honmachi, Kanazawa 920-8681 Japan
TEL 81-76-262-1200 FAX 81-76-223-1921
E-mail sh-info@shibuya.co.jp


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