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Ultrasonic Cleaning Systems
Ultrasonic Cleaning Systems

Ultrasonic Cleaning Systems

Our ultrasonic cleaning systems are ideal for cleaning semiconductor wafers, FPD glass, and other precision components. We offer a comprehensive lineup of ultrasonic products covering a wide frequency range. Utilizing our in-house cleanrooms and laboratories, we propose cleaning methods and processes that achieve peak performance. Furthermore, we provide a global after-sales service network through our overseas locations.


Ultrasonic Cleaner: QUAVA US Shower AD

Ultrasonic Cleaning Systems

Ultrasonic Cleaning Systems

Ultrasonic Cleaner: QUAVA US Shower AD

Ultrasonic Cleaner: QUAVA US Shower AD

This ultrasonic cleaner performs precision cleaning by simultaneously applying a shower and ultrasonic waves, preventing the re-attachment of particles during the process.

Features

  • Simultaneous ultrasonic and shower cleaning instantly flushes away dislodged contaminants.
  • A single transducer can cover a width of up to 3m, enabling the cleaning of massive substrates with just one unit.
  • Our unique liquid contact method reduces DI water consumption by up to 40%.
  • The proprietary transducer structure transmits ultrasonic energy directly to the workpiece, significantly enhancing cleaning performance.

Ultrasonic Cleaner: QUAVA Spot Shower

Ultrasonic Cleaner: QUAVA Spot Shower

This system injects cleaning fluid infused with ultrasonic waves through a nozzle to perform pinpoint cleaning on specific target areas.

Features

  • Efficiently cleans targeted areas by directly injecting ultrasonic-infused cleaning fluid from the nozzle.
  • The high-frequency lineup from 430 kHz to 5 MHz allows for the selection of the optimal frequency based on particle size.
  • Compatible with chemicals and high-temperature cleaning fluids.
  • Suitable for single-wafer cleaning of semiconductor wafers/PLP, as well as hard disk cleaning.



Contact Us
KAIJO Corporation
Ultrasonic Equipment Sales Dept.
3-1-5, Sakae-cho, Hamura, Tokyo 205-8607 TEL +81(42)555-4794 FAX +81(42)555-0291

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