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High-Accuracy Die Bonders
DB258H

Low-cost & high-accuracy bonder / Accuracy: ±2µm

DB258H (Thermo-compression (TC) bonding system)

DB258H (Thermo-compression (TC) bonding system)

This high-accuracy thermo-compression (TC) bonder is suitable for laser diode bonding, sub-mount bonding and optical device bonding under optical module assembly. With parameter settings and various options which enable various bonding methods, this machine is optimal for both prototyping and low volume manufacturing. It is also suited for module and process development.

Features

  • High-accuracy bonding (3 σ = ±2µm)
  • Capable of handling micro chips
  • The automatic calibration mechanism stabilizes accuracy by canceling positional changes which occur with time.
  • The parametric sequence control enables programming control of the force, temperature and timings.
  • The force feedback method achieves high-accuracy bonding force control.
  • A variety of optional settings, such as eutectic bonding, correspond to various bonding methods easily.

Calibration

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The calibration mechanism stabilizes alignment accuracy by detecting the relative positional deviation of the camera used for vision system alignment and feeding back the deviation when alignment for mounting is performed.
With vision system alignment, position accuracy cannot be maintained if the camera position changes because this results in changes in mounting positions as well. The camera is fixed in place and may not seem to be moving, but factors such as use of heating mechanisms and changes in ambient temperature cause the machine to expand/contract, resulting in changes in the camera position over time.
The calibration mechanism therefore offsets such positional changes that occur over time to stabilize alignment accuracy.
This mechanism first performs pattern matching using both the top camera and bottom camera with respect to the same target mark to detect each camera’s deviation from the target mark. By feeding back this deviation when alignment for mounting is performed, the deviation of the camera position is offset.

Options

  • Tool head
  • N²hot purge
  • Ultrasonic head
  • Large-size substrate handling (7 mm or larger)
  • Dispenser
  • Paste transfer mechanism

Specifications

Model DB258H
Applicable product type VCSEL / LD (Laser Diode) / PD (Photo Diode) / Optical module / Analog device / LED / etc.
Substrate size 0.4 mm square to 7.0 mm square
Chip size 0.25 mm square to 5.0 mm square
Chip supply method Tray supply
Chip heating method Pulse heat
Substrate heating method Constant heat / Pulse heat
Bonding load 0.1 to 8.8 N
Mounting accuracy ±2 µm (3σ)
Unit dimensions 1100 (W) x 1140 (D) x 2200 (H) mm
Unit weight 1,300 kg
Contact Us
Shibuya Corporation
Mechatronics Div. S&H Div. Semi-Conductor System Sales Dept.
2-232, Wakamiya, Kanazawa 920-0054 JAPAN Telephone : +81(76)262-2201 Fax : +81(76)262-2210

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