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High-Accuracy Die Bonders
FDB210/211

High-accuracy & high-throughput bonder / Wide-variety bonding / Singulated substrates / Laser diode / Accuracy: ±2µm

FDB210 / 211 (Thermo-compression (TC) bonding system)

FDB210 / 211 (Thermo-compression (TC) bonding system)

This high-throughput and high-accuracy thermo-compression (TC) bonder is for optical module assembly such as laser diode bonding, sub-mount bonding and silicon photonics bonding. Options are available for multiple chip bonding and other bonding methods. FDB210 covers tray supply while FDB211 covers grip-ring supply.

Features

  • High-accuracy bonding (3 σ = ±2µm)
  • Capable of handling micro chips.
  • The automatic calibration mechanism stabilizes accuracy by canceling positional changes which occur with time.
  • The parametric sequence control enables programming control of the force, temperature and timings.
  • The force feedback method achieves high-accuracy force control.
  • A variety of optional settings, such as eutectic bonding, correspond to various bonding methods easily.

Calibration

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The calibration mechanism stabilizes alignment accuracy by detecting the relative positional deviation of the camera used for vision system alignment and feeding back the deviation when alignment for mounting is performed.
With vision system alignment, position accuracy cannot be maintained if the camera position changes because this results in changes in mounting positions as well. The camera is fixed in place and may not seem to be moving, but factors such as use of heating mechanisms and changes in ambient temperature cause the machine to expand/contract, resulting in changes in the camera position over time.
The calibration mechanism therefore offsets such positional changes that occur over time to stabilize alignment accuracy.
This mechanism first performs pattern matching using both the top camera and bottom camera with respect to the same target mark to detect each camera’s deviation from the target mark. By feeding back this deviation when alignment for mounting is performed, the deviation of the camera position is offset.

Specifications

Model FDB210 / 211
Applicable product type VCSEL/LD (Laser Diode)/PD (Photo Diode)/Optical module/Analog device/LED/etc
Substrate size 0.5 mm square to 10.0 mm square
Chip size 0.25 mm square to 5.0 mm square
Chip supply method FDB211: grip ring (FDB210: tray supply)
Chip heating method Pulse heating
Substrate heating method Pulse heating
Bonding load 0.2 to 8.8 N
Mounting accuracy ±2µm (3 σ)
Unit dimensions 1730 (W) X 1981 (D) X 1650 (H) mm
Unit weight 3500 kg
Contact Us
Shibuya Corporation
Mechatronics Div. S&H Div. Semi-Conductor System Sales Dept.
2-232, Wakamiya, Kanazawa 920-0054 JAPAN Telephone : +81(76)262-2201 Fax : +81(76)262-2210

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