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High-Accuracy Die Bonders
FDB250

High-accuracy bonder / For COB, COC, SIP / Laser heater / Accuracy: ±2µm

FDB250 (Thermo-compression (TC) bonding system)

FDB250 (Thermo-compression (TC) bonding system)

This is high-accuracy thermo-compression (TC) bonder for chip on board (CoB) packaging. Laser heat bonding process is performed by the equipped laser heater which is to accelerate bonding process speed. Machine allows various kind of packaging includes NCF bonding and die stacking bonding.

Features

  • Fast temperature ramp up and cooling are achieved by laser heater.
  • Temperature deformation of the heater is minimized to enable accurate gap control for bonding.
  • High-accuracy bonding (3 σ = ±2µm)
  • The automatic calibration mechanism stabilizes accuracy by canceling positional changes which occur with time.

Laser Heater

This system performs heating by irradiating the target object with laser light through glass.
Two methods are available: the "Indirect Method," which heats via a tool material, and the "Direct Method," which irradiates the chip or other components directly.
Compared to conventional pulse heaters, this technology enables faster temperature ramp-up and rapid cooling. Furthermore, since there is minimal thermal expansion of the head, height control can be managed with ease.
The laser is composed of multiple fibers, allowing for selective irradiation of specific areas. This makes it possible to partially heat targeted sections within a single chip.



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Calibration

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The calibration mechanism stabilizes alignment accuracy by detecting the relative positional deviation of the camera used for vision system alignment and feeding back the deviation when alignment for mounting is performed.
With vision system alignment, position accuracy cannot be maintained if the camera position changes because this results in changes in mounting positions as well. The camera is fixed in place and may not seem to be moving, but factors such as use of heating mechanisms and changes in ambient temperature cause the machine to expand/contract, resulting in changes in the camera position over time.
The calibration mechanism therefore offsets such positional changes that occur over time to stabilize alignment accuracy.
This mechanism first performs pattern matching using both the top camera and bottom camera with respect to the same target mark to detect each camera’s deviation from the target mark. By feeding back this deviation when alignment for mounting is performed, the deviation of the camera position is offset.

Options

  • Tool head and various attachments
  • Exclusive air cooling mechanism
  • Pulse heater (for large-size chips: Max. 20 mm)
  • Low-force head (min. 0.2 N)
  • Mapping soft

Specifications

Model FDB250
Applicable product type Memory / Logic / Analog / TSV chip
Substrate size Max.240mmX100mm
Chip size Max. 12 mm square
Chip supply method Max. 12inch wafer ring
Chip heating method Laser heater
Substrate heating method Constant heating
Bonding load 1 to 100 N
Mounting accuracy ±2µm (3σ)
Unit dimensions 1985 (W) × 2470 (D) × 1950 (H) mm (excluding substrate loader/unloader)
Unit weight 2000kg
Contact Us
Shibuya Corporation
Mechatronics Div. S&H Div. Semi-Conductor System Sales Dept.
2-232, Wakamiya, Kanazawa 920-0054 JAPAN Telephone : +81(76)262-2201 Fax : +81(76)262-2210

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