Inspection & repair machine / For min. φ0.05mm balls
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This machine does post-ball inspection and repair (rework) for the wafer bumping. Machine is also capable of repairing the double ball error on the ball mounted wafer.
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| Model | SBM381 |
|---|---|
| Applicable product type | Wafer bumping Wafer level packages Electronic components |
| Ball size | φ0.05 to φ0.5 mm |
| Inspection/repair range | φ12-inch |
| Wafer size | φ8, φ12-inch (φ4 to 6-inch optionally available) |
| Unit dimensions | 1440 (L) × 1792 (W) × 1750 (H) mm |
| Unit weight | 1,500 kg |
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